Optical constants of e-beam evaporated and annealed Nb2O5 thin films with varying thickness

被引：14

作者：

Zhao, Dong-Dong ^{[1
]}

Cai, Qing-Yuan ^{[2
]}

Zheng, Yu-Xiang ^{[1
]}

Zhang, Jin-Bo ^{[1
]}

Yang, Shang-Dong ^{[1
]}

Yang, Liao ^{[1
]}

Liu, Zhun-Hua ^{[1
]}

Zhang, Rong-Jun ^{[1
]}

Wang, Song-You ^{[1
]}

Chen, Liang-Yao ^{[1
]}

机构：

[1] Fudan Univ, Dept Opt Sci & Engn, Key Lab Micro & Nano Photon Struct, Minist Educ, Shanghai 200433, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai 200083, Peoples R China

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2016年 / 49卷 / 26期

关键词：

niobium pentoxide; annealing; optical properties; phase transformation; SPECTROSCOPIC ELLIPSOMETRY; SCANNING ELLIPSOMETER; NIOBIUM; DEHYDRATION; STABILITY; POLARIZER; STRESS; TA2O5;

D O I：

10.1088/0022-3727/49/26/265304

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Niobium pentoxide (Nb2O5) films with different thicknesses were prepared using the electron beam evaporation method and then annealed at temperatures from 300 degrees C to 800 degrees C before being characterized by variable-angle spectroscopic ellipsometry, x-ray diffraction, etc. The results showed that the optical constants and microstructures of Nb2O5 films exhibit a strong dependence on the annealing temperature. In the visible light region, the refractive indices show a positive correlation with the annealing temperature from 300 degrees C to 600 degrees C, but a negative correlation from 600 degrees C to 800 degrees C. The amorphous Nb2O5 film converts into TT-Nb2O5 (pseudo-hexagonal) after annealing at 500-600 degrees C, and into T-Nb2O5 (orthorhombic) after annealing at 700-800 degrees C.

引用

页数：5

共 50 条

[31] Effect of Ar+ ion irradiation on structural and optical properties of e-beam evaporated cadmium telluride thin films
Shanmugan, S.
Mutharasu, D.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2010, 13 (04) : 298 - 302
[32] Highly dense amorphous Nb2O5 films with closed nanosized pores
Vinnichenko, M.
Rogozin, A.
Grambole, D.
Munnik, F.
Kolitsch, A.
Moeller, W.
Stenzel, O.
Wilbrandt, S.
Chuvilin, A.
Kaiser, U.
APPLIED PHYSICS LETTERS, 2009, 95 (08)
[33] Filamentary resistive switching in amorphous and polycrystalline Nb2O5 thin films
Maehne, H.
Berger, L.
Martin, D.
Klemm, V.
Slesazeck, S.
Jakschik, S.
Rafaja, D.
Mikolajick, T.
SOLID-STATE ELECTRONICS, 2012, 72 : 73 - 77
[34] Structural and optical properties of Nb2O5 films prepared by dual ion assisted deposition
Ai, Wanjun
Xiong, Shengming
OPTICS AND LASER TECHNOLOGY, 2022, 150
[35] Thermal and optical properties of PMMA films reinforced with Nb2O5 nanoparticles
Hajduk, B.
Bednarski, H.
Jarka, P.
Janeczek, H.
Godzierz, M.
Taiiski, T.
SCIENTIFIC REPORTS, 2021, 11 (01)
[36] Ellipsometric study of optical properties and small inhomogeneities of Nb2O5 films
Tikhonravov, AV
Trubetskov, MK
Clarke, G
Sullivan, BT
Dobrowolski, JA
ADVANCES IN OPTICAL INTERFERENCE COATINGS, 1999, 3738 : 183 - 187
[37] Influence of thickness and calcination under ammonia gas flow on topographical, optical and photocatalytic properties of Nb2O5 thin films prepared by sol-gel: a comparative study
Danish, Mohd.
Pandey, Ashutosh
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2016, 27 (07) : 6939 - 6946
[38] Structural and physical properties of NbO2 and Nb2O5 thin films prepared by magnetron sputtering
Hossain, Nazmul
Gunes, Ozan
Zhang, Chunzi
Koughia, Cyril
Li, Yuanshi
Wen, Shi-Jie
Wong, Rick
Kasap, Safa
Yang, Qiaoqin
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2019, 30 (10) : 9822 - 9835
[39] Corrosion behaviour of polycrystalline Nb2O5 thin films and its size effects
Destro, F. B.
Cilense, M.
Nascimento, M. P.
Gonzalez Garcia, F.
Hein, L. R. O.
Simoes, A. Z.
PROTECTION OF METALS AND PHYSICAL CHEMISTRY OF SURFACES, 2016, 52 (01) : 104 - 110
[40] Sol-gel derived Nb2O5 thin films for photonic applications
Lazarova, K.
Vasileva, M.
Marinov, G.
Babeva, T.
BULGARIAN CHEMICAL COMMUNICATIONS, 2013, 45 : 23 - 27

← 1 2 3 4 5 →