Optical constants of e-beam evaporated and annealed Nb2O5 thin films with varying thickness

被引：14

作者：

Zhao, Dong-Dong ^{[1
]}

Cai, Qing-Yuan ^{[2
]}

Zheng, Yu-Xiang ^{[1
]}

Zhang, Jin-Bo ^{[1
]}

Yang, Shang-Dong ^{[1
]}

Yang, Liao ^{[1
]}

Liu, Zhun-Hua ^{[1
]}

Zhang, Rong-Jun ^{[1
]}

Wang, Song-You ^{[1
]}

Chen, Liang-Yao ^{[1
]}

机构：

[1] Fudan Univ, Dept Opt Sci & Engn, Key Lab Micro & Nano Photon Struct, Minist Educ, Shanghai 200433, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai 200083, Peoples R China

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2016年 / 49卷 / 26期

关键词：

niobium pentoxide; annealing; optical properties; phase transformation; SPECTROSCOPIC ELLIPSOMETRY; SCANNING ELLIPSOMETER; NIOBIUM; DEHYDRATION; STABILITY; POLARIZER; STRESS; TA2O5;

D O I：

10.1088/0022-3727/49/26/265304

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Niobium pentoxide (Nb2O5) films with different thicknesses were prepared using the electron beam evaporation method and then annealed at temperatures from 300 degrees C to 800 degrees C before being characterized by variable-angle spectroscopic ellipsometry, x-ray diffraction, etc. The results showed that the optical constants and microstructures of Nb2O5 films exhibit a strong dependence on the annealing temperature. In the visible light region, the refractive indices show a positive correlation with the annealing temperature from 300 degrees C to 600 degrees C, but a negative correlation from 600 degrees C to 800 degrees C. The amorphous Nb2O5 film converts into TT-Nb2O5 (pseudo-hexagonal) after annealing at 500-600 degrees C, and into T-Nb2O5 (orthorhombic) after annealing at 700-800 degrees C.

引用

页数：5

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