Laser direct writing of rotationally symmetric high-resolution structures

被引：20

作者：

Haefner, Matthias ^{[1
,2
]}

Pruss, Christof ^{[1
,2
]}

Osten, Wolfgang ^{[1
,2
]}

机构：

[1] Univ Stuttgart, Inst Tech Opt, D-70569 Stuttgart, Germany

[2] Stuttgart Res Ctr Photon Engn SCoPE, D-70569 Stuttgart, Germany

来源：

APPLIED OPTICS | 2011年 / 50卷 / 31期

关键词：

COMPUTER-GENERATED HOLOGRAMS; INTERFEROMETRIC TEST; ELEMENTS;

D O I：

10.1364/AO.50.005983

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a laser direct writing system for the efficient fabrication of high-resolution axicon structures. The setup makes use of scanning beam interference lithography incorporated with a fringe locking scheme for tight fringe phase control and allows us to fabricate large area structures with a period down to 450 nm. (C) 2011 Optical Society of America

引用

页码：5983 / 5989

页数：7

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