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- [2] Directed self-assembly of 5 nm block copolymer lamellae enabled by nanoimprint lithography ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2017, 253
- [3] Cut Mask Optimization for Multi-Patterning Directed Self-Assembly Lithography PROCEEDINGS OF THE 2017 DESIGN, AUTOMATION & TEST IN EUROPE CONFERENCE & EXHIBITION (DATE), 2017, : 1498 - 1503
- [4] Multiple patterning via layout decomposition method for directed self-assembly lithography JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 2023, 22 (04):
- [5] Directed self-assembly compliant flow with immersion lithography: from material to design and patterning JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2016, 15 (03):
- [8] Fabrication of Templates with Rectangular Bits on Circular Tracks by Combining Block Copolymer Directed Self-Assembly and Nanoimprint Lithography ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES IV, 2012, 8323
- [9] Fabrication of templates with rectangular bits on circular tracks by combining block copolymer directed self-assembly and nanoimprint lithography JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2012, 11 (03):
- [10] Via patterning in the 7-nm node using immersion lithography and graphoepitaxy directed self-assembly JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2017, 16 (02):