Above 600 mS/mm Transconductance with 2.3A/mm Drain Current Density AlN/GaN High-Electron-Mobility Transistors Grown on Silicon

被引:27
作者
Medjdoub, Farid [1 ]
Zegaoui, Malek [1 ]
Waldhoff, Nicolas [1 ]
Grimbert, Bertrand [1 ]
Rolland, Nathalie [1 ]
Rolland, Paul-Alain [1 ]
机构
[1] Inst Elect Microelect & Nanotechnol, F-59650 Villeneuve Dascq, France
关键词
ALGAN/GAN; HEMTS;
D O I
10.1143/APEX.4.064106
中图分类号
O59 [应用物理学];
学科分类号
摘要
AlN/GaN high-electron-mobility transistors (HEMTs) capped with an in-situ grown SiN have been successfully developed on 100 mm Si substrates. A unique combination of maximum output current density exceeding 2A/mm and a record extrinsic transconductance above 600 mS/mm has been reached, which is well beyond the highest reported values of any GaN-on-Si HEMTs. The current gain extrinsic cutoff frequency f(T) and the maximum oscillation frequency f(max) were 85 and 103 GHz with 0.16-mu m gate length, respectively, resulting in a high f(T) - L-g product that promises low-cost, high performance millimeter wave electronics. (C) 2011 The Japan Society of Applied Physics
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页数:3
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