Ultra-precision micro structuring by means of mechanical machining

被引：13

作者：

Kawai, T ^{[1
]}

Sawada, K ^{[1
]}

Takeuchi, Y ^{[1
]}

机构：

[1] FANUC Ltd, Yamanashi 4010597, Japan

来源：

14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2001年

关键词：

D O I：

10.1109/MEMSYS.2001.906469

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Silicon-based micro-machining methods are used to fabricate micro parts in microelectromechanical (MEMS) field. This method of production enables production materials with exact and clear slope and free shape with high quality. For mass production rectangular grooves producing silicon technology is effectively used.

引用

页码：22 / 25

页数：2

共 6 条

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Kawai, T
Takeuchi, Y
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Kawai, T
Hirai, T
Takeuchi, Y
Sata, T
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