High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array

被引：24

作者：

Wang, Zhenfu ^{[1
,2
]}

Ning, Yongqiang ^{[1
]}

Zhang, Yan ^{[1
,2
]}

Shi, Jingjing ^{[1
,2
]}

Zhang, Xing ^{[1
,2
]}

Zhang, Lisen ^{[1
,2
]}

Wang, Wei ^{[1
,2
]}

Liu, Di ^{[1
,2
]}

Hu, Yongsheng ^{[1
,2
]}

Cong, Haibing ^{[1
,2
]}

Qin, Li ^{[1
]}

Liu, Yun ^{[1
]}

Wang, Lijun ^{[1
]}

机构：

[1] Changchun Inst Opt Fine Mech & Phys, Key Lab Excited State Proc, Changchun 130033, Jilin, Peoples R China

[2] Chinese Acad Sci, Grad Univ, Beijing 100039, Peoples R China

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 23期

基金：

中国国家自然科学基金;

关键词：

SURFACE-EMITTING LASER; FABRICATION;

D O I：

10.1364/OE.18.023900

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

High power and good beam quality of two-dimensional bottom-emitting vertical-cavity surface-emitting laser array with GaAs microlens on the substrate is achieved. Uniform and matched convex microlens is directly fabricated by one-step diffusion-limited wet-etching techniques on the emitting windows. The maximum output power is above 1W at continuous-wave operation at room temperature, and the far-field beam divergence is below 6.6 degrees at a current of 4A. These properties between microlens-integrated and conventional device at different operating current are demonstrated. (C) 2010 Optical Society of America

引用

页码：23900 / 23905

页数：6

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