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Univ Freiburg, Dept Microsyst Engn IMTEK, Fritz Huettinger Chair Microelect, D-79110 Freiburg, Germany
HSG IMIT, Inst Micromachining & Informat Technol, Villigen, Switzerland
Univ Freiburg, Dept Microsyst Engn IMTEK, Fac Chair, Chair Microelect, D-79110 Freiburg, Germany Univ Freiburg, Dept Microsyst Engn IMTEK, Fritz Huettinger Chair Microelect, D-79110 Freiburg, Germany