Laser Beam Homogenizing: Limitations and Constraints

被引:75
作者
Voelkel, Reinhard [1 ]
Weible, Kenneth J. [1 ]
机构
[1] SUSS MicroOpt SA, CH-2000 Neuchatel, Switzerland
来源
OPTICAL FABRICATION, TESTING, AND METROLOGY III | 2008年 / 7102卷
关键词
Kohler integrator; fly's eye condenser; laser beam homogenizer; micro-optics; microlens arrays; beam shaping; laser beam shaping; laser material processing; random diffusers;
D O I
10.1117/12.799400
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Laser beam homogenizing and beam shaping are key enabling technologies for many applications today. Periodic microlens arrays are widely used to transform Gaussian or non-uniform beam profile into a uniform "flat-top". Each rnicrolens element samples the input beam and spreads it over a given angular distribution. Incoherent beams that are either temporally or spatially incoherent can produce very uniform intensity profiles. However, coherent beams will experience interference effects in the recombination of the beams generated by each individual rnicrolens element. Rotating or moving elements, such as a rotating diffuser or a vibrating optical fiber, are used to average these interference patterns. An integration of several different patterns will smooth out the intensity profile. Unfortunately, this averaging is not always possible. Some applications require a single shot from a pulse laser or work at very high data rates that do not allow an averaging over 10 to 50 frames. We will discuss the concepts of Kohler illumination and Kohler integrators and its limitations and constrains for laser beam homogenizing. We will show how micro-optical elements comprised of a randomly varying component can be used to smooth out interference and speckle effects within the far-field intensity profile.
引用
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页数:12
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