Roll-to-roll printed gratings in cellulose acetate web using novel nanoimprinting device

被引:42
作者
Makela, Tapio [1 ]
Haatainen, Tomi [1 ]
Ahopelto, Jouni [1 ]
机构
[1] VTT Micro & Nanoelect, FI-02044 Espoo, Finland
关键词
Nanoimprinting; Roll embossing; Roll-to-roll manufacturing; LITHOGRAPHY; FABRICATION;
D O I
10.1016/j.mee.2011.02.016
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A high volume printing process for polymer gratings at submicron scale was developed for cellulose acetate (CA) film. A flexible Ni-stamp, consisting printing pattern, was used as a master for patterning process. High speed roll-to-roll manufacturing method was tested using custom made roll-to-roll device. Device enables a high throughput and a low cost production method for micron and submicron structures. This small scale device is suitable for continuous imprinting using 50 mm wide plastic web. Roll-to-roll device consist an unwinder, an imprinting unit and a rewinder. We demonstrated continuous imprinting process using the 95 micron thick CA film as a substrate. Printing speeds from 0.2 m/min up to 20 m/min was used to demonstrate high volume process. Lifetime of the stamp was long and no structural change was observed after a several meters of imprints. The best replication is achieved at the speed of 0.2 m/min using pressure of 8 MPa and temperature of 105 degrees C. Height and quality of the printed gratings was characterized by AFM. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:2045 / 2047
页数:3
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