Femtosecond laser fabrication of micro spike-arrays on tungsten surface

被引：10
|
作者：
Sano, T [1 ]
Yanai, M [1 ]
Ohmura, E [1 ]
Nomura, Y [1 ]
Miyamoto, I [1 ]
Hirose, A [1 ]
Kobayashi, KF [1 ]
机构：
[1] Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
来源：
APPLIED SURFACE SCIENCE | 2005年 / 247卷 / 1-4期
关键词：
microspike-array; femtosecond laser; micro emitter;
D O I：
10.1016/j.apsusc.2005.01.049
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Microspike-arrays were fabricated by irradiating a femtosecond laser on a tungsten surface through a mask opening in air. The natural logarithms of the calculated intensity distributions diffracted at the edge of the mask opening were qualitatively consistent with the experimental results of the shape and arrays of microspikes fabricated. The shape and the array of microspikes depend on the intensity distribution diffracted at the edge of the mask opening. This microspike-array has the potential to be used as a source of micro emitter tips. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：340 / 346
页数：7
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