Low-threshold multiple-wavelength vertical-cavity laser arrays obtained by postgrowth wet oxidation

被引:7
作者
Fiore, A [1 ]
Akulova, YA [1 ]
Ko, J [1 ]
Hegblom, ER [1 ]
Coldren, LA [1 ]
机构
[1] Univ Calif Santa Barbara, ECE Dept, Santa Barbara, CA 93106 USA
关键词
D O I
10.1049/el:19981193
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A mask-defined array of multiple-wavelength vertical-cavity surface-emitting lasers with submilliamp threshold currents over a 22nm wavelength span has been fabricated with a single epitaxial growth on a conventional substrate. Tuning is achieved by using the combination of lateral and vertical wet oxidation of an AlGaAs layer inside the cavity.
引用
收藏
页码:1857 / 1858
页数:2
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