Curving of Large-Format Infrared Sensors

被引:0
|
作者
O'Masta, Mark [1 ]
Binh-Minh Nguyen [1 ]
Gurga, Alexander [1 ]
Sasse, Trevor [1 ]
Hempe, Brian [1 ]
Neuhaus, Christian [1 ]
Clough, Eric [1 ]
Hundley, Jacob [1 ]
Patterson, Pamela [1 ]
Jenkins, James [1 ]
Chen, Mary [1 ]
Jacques, Gregory [1 ]
Linton, Scott [1 ]
Perez, Francisco [1 ]
van Ysseldyk, Colin [1 ]
Wang, Esther [1 ]
Tang, Yan [1 ]
Niwa, Kenta [1 ]
Schaedler, Tobias [1 ]
Kyrtsos, Alexandros [2 ]
Glennon, John [3 ]
Glasmann, Andreu [2 ]
Bellotti, Enrico [2 ,3 ]
McKnight, Geoff [1 ]
机构
[1] HRL Labs LLC, 3011 Malibu Canyon Rd, Malibu, CA 90265 USA
[2] Boston Univ, Dept Elect & Comp Engn, Boston, MA 02215 USA
[3] Boston Univ, Div Mat Sci & Engn, Boston, MA 02215 USA
来源
关键词
Focal plane array; curved sensor; infrared photodetector; mid-wave infrared; wide field-of-view imaging;
D O I
10.1117/12.2618122
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High resolution, wide field-of-view, infrared (IR) imagers find use in defense and civilian applications. The most demanding of them desire uniform sensitivity across an image's field of view, while maintaining a small and light-weight optical design. These attributes can be achieved by curving of the focal plane array to reduce the need for field curvature correction. Using experimental and numerical methods, we investigated the spherical curving of hybridized arrays to demonstrate mechanical feasibility and opto-electronic performance. Each hybridized array comprised a 4k x 4k, 10 mu m pixel pitch, midwave IR (MWIR) detector hybridized to a 67 mm diagonal fanout chip. We curve an array to 139.2 mm radius of curvature, resulting in a pixel area coverage of 0.086 sr. Measurements across the curved array revealed minimal variation in bandgap (<0.1 mu m) and no appreciable difference in dark current.
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收藏
页数:7
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