Structural characterization of Eu-doped GaN by transmission electron microscopy

被引:0
作者
Seo, Jongwon [1 ]
Chen, Shaoqiang [1 ]
Sawahata, Junji [1 ]
Mitome, Masaharu [2 ]
Akimoto, Katsuhiro [1 ]
机构
[1] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan
[2] Natl Inst Mat Sci, Nanoscale Mat Ctr, Tsukuba, Ibaraki 3050044, Japan
来源
JOURNAL OF CERAMIC PROCESSING RESEARCH | 2008年 / 9卷 / 01期
关键词
GaN; TEM; HRTEM; XRD; EDS; rare earth (Eu);
D O I
暂无
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The structural properties of Eu-doped GaN films grown on sapphire (0001) substrates by molecular beam epitaxy were studied using cross sectional transmission electron microscopy (TEM). The Eu concentration was estimated to be about 2at.% by Rutherford backscattering spectrometry and energy dispersive X-ray spectroscopy. Selected area diffraction patterns of the film showed a hexagonal structure, and no other anomalous patterns such as from Eu and EuN were observed. The high resolution TEM observation of the films showed a high density of stacking faults which was hardly observed in undoped GaN, bending layers and a small portion of cubic phase. The causes of the formation of stacking faults and bending of layers are discussed.
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页码:68 / 70
页数:3
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