Scanning Wavefront Sensor for Measurement of Highly Divergent Wavefronts

被引:9
|
作者
Fuerst, Martin E. [1 ]
Schitter, Georg [1 ]
机构
[1] Vienna Univ Technol, Christian Doppler Lab Precis Engn Automated In Li, Automat & Control Inst, Vienna, Austria
来源
IFAC PAPERSONLINE | 2019年 / 52卷 / 15期
关键词
Freeform optics; optical metrology; wavefront measurement; scanning system; Shack-Hartmann sensor; surface metrology; SHACK-HARTMANN SENSOR; FREEFORM;
D O I
10.1016/j.ifacol.2019.11.644
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper deals with the characterization of freeform optics by means of a wavefront sensor. Freeform optics show an increasing demand since they have the potential to improve optical system performance while reducing size, weight and complexity. To directly measure the performance of a freeform optical part, a novel scanning wavefront sensor approach is proposed which is faster than a coordinate measuring machine and more flexible than an interferometer. The challenges lie in the limited dynamic range of a Shack-Hartmann sensor concerning wavefront slope and curvature. Both limits can be overcome by repositioning the sensor and orienting it tangentially to the wavefront. An automatic setup is developed and first measurements are demonstrated on a highly divergent wavefront. It is shown that the dynamic range of the sensor is increased by scanning the sensor along the wavefront and orienting the sensor tangential to the wavefront in each position. Measurements are taken over a range of +/- 15 degrees, which is an improvement by a factor 5 compared to the typical dynamic range of +/- 3 degrees for a static Shack-Hartmann sensor. (C) 2019, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. All rights reserved.
引用
收藏
页码:25 / 30
页数:6
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