High-precision ultrashort pulsed laser drilling of micro and nano holes using multibeam processing

High precision multibeam processing is a useful approach to increase the productivity of high precision laser material processing by means of ultrashort pulsed (USP) laser radiation. In the field of micro- and nanostructuring multibeam ultrashort pulsed laser processing attracts increasing attention due to its ability to generate periodic pattern like filters within an economically reasonable time of up to 12.000 holes/sec. Thus, this technology has become relevant for applications in the filtration industry and biotech industry. The developed multibeamscanner (MBS) is capable of drilling holes with extremely small outlet diameters (< 1 mu m) into various materials with a customized arrangement and a density of more than 10.000 holes per mm(2). The aim is to investigate how the exit diameter of single-digit sized holes can be further reduced using the multibeamscanner and whether an increase in productivity is possible.