Preparation and characterization of nanocrystalline ITO thin films on glass and clay substrates by ion-beam sputter deposition method

被引：33
|
作者：
Venkatachalam, S. [1 ]
Nanjo, H. [1 ]
Kawasaki, K. [1 ]
Wakui, Y. [1 ]
Hayashi, H. [1 ]
Ebina, T. [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Sendai, Miyagi 9838551, Japan
来源：
APPLIED SURFACE SCIENCE | 2011年 / 257卷 / 21期
关键词：
Ion-beam sputtering; Nanocrystalline; ITO; Flexible clay substrate; XRD; Optical transmittance; SEM; AFM; Electrical conductivity; INDIUM-TIN-OXIDE; PULSED-LASER DEPOSITION; ELECTRICAL-PROPERTIES; HEAT-RESISTANT; TEMPERATURE; POLYMER; FABRICATION; STRESS;
D O I：
10.1016/j.apsusc.2011.05.065
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Nanocrystalline indium tin oxide (ITO) thin films were prepared on clay-1 (Clay-TPP-LP-SA), clay-2 (Clay-TPP-SA) and glass substrates using ion-beam sputter deposition method. X-ray diffraction (XRD) patterns showed that the as-deposited ITO films on both clay-1 and clay-2 substrates were a mixture of amorphous and polycrystalline. But the as-deposited ITO films on glass substrates were polycrystalline. The surface morphologies of as-deposited ITO/glass has smooth surface; in contrast, ITO/clay-1 has rough surface. The surface roughnesses of ITO thin films on glass and clay-1 substrate were calculated as 4.3 and 83 nm, respectively. From the AFM and SEM analyses, the particle sizes of nanocrystalline ITO for a film thickness of 712 nm were calculated as 19.5 and 20 nm, respectively. Optical study showed that the optical transmittance of ITO/clay-2 was higher than that of ITO/clay-1. The sheet resistances of as-deposited ITO/clay-1 and ITO/clay-2 were calculated as 76.0 and 63.0 Omega/square, respectively. The figure of merit value for as-deposited ITO/clay-2 (12.70 x 10(-3)/Omega) was also higher than that of ITO/clay-1 (9.6 x 10(-3)/Omega), respectively. The flexibilities of ITO/clay-1 and ITO/clay-2 were evaluated as 13 and 12 mm, respectively. However, the ITO-coated clay-2 substrate showed much better optical and electrical properties as well as flexibility as compared to clay-1. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：8923 / 8928
页数：6
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