Preparation and characterization of nanocrystalline ITO thin films on glass and clay substrates by ion-beam sputter deposition method

被引：33

作者：

Venkatachalam, S. ^{[1
]}

Nanjo, H. ^{[1
]}

Kawasaki, K. ^{[1
]}

Wakui, Y. ^{[1
]}

Hayashi, H. ^{[1
]}

Ebina, T. ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Sendai, Miyagi 9838551, Japan

来源：

APPLIED SURFACE SCIENCE | 2011年 / 257卷 / 21期

关键词：

Ion-beam sputtering; Nanocrystalline; ITO; Flexible clay substrate; XRD; Optical transmittance; SEM; AFM; Electrical conductivity; INDIUM-TIN-OXIDE; PULSED-LASER DEPOSITION; ELECTRICAL-PROPERTIES; HEAT-RESISTANT; TEMPERATURE; POLYMER; FABRICATION; STRESS;

D O I：

10.1016/j.apsusc.2011.05.065

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Nanocrystalline indium tin oxide (ITO) thin films were prepared on clay-1 (Clay-TPP-LP-SA), clay-2 (Clay-TPP-SA) and glass substrates using ion-beam sputter deposition method. X-ray diffraction (XRD) patterns showed that the as-deposited ITO films on both clay-1 and clay-2 substrates were a mixture of amorphous and polycrystalline. But the as-deposited ITO films on glass substrates were polycrystalline. The surface morphologies of as-deposited ITO/glass has smooth surface; in contrast, ITO/clay-1 has rough surface. The surface roughnesses of ITO thin films on glass and clay-1 substrate were calculated as 4.3 and 83 nm, respectively. From the AFM and SEM analyses, the particle sizes of nanocrystalline ITO for a film thickness of 712 nm were calculated as 19.5 and 20 nm, respectively. Optical study showed that the optical transmittance of ITO/clay-2 was higher than that of ITO/clay-1. The sheet resistances of as-deposited ITO/clay-1 and ITO/clay-2 were calculated as 76.0 and 63.0 Omega/square, respectively. The figure of merit value for as-deposited ITO/clay-2 (12.70 x 10(-3)/Omega) was also higher than that of ITO/clay-1 (9.6 x 10(-3)/Omega), respectively. The flexibilities of ITO/clay-1 and ITO/clay-2 were evaluated as 13 and 12 mm, respectively. However, the ITO-coated clay-2 substrate showed much better optical and electrical properties as well as flexibility as compared to clay-1. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：8923 / 8928

页数：6

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