Super-resolution imaging for automatic visual inspection systems

The purpose of this research is to apply super-resolution processing to defect inspections in order to automate such inspections and increase their precision. Super-resolution processing, which is a method that creates a high-resolution image from multiple low-resolution images, could be an effective solution in environments where images of sufficient resolution cannot be obtained. However, reduction of noise in the generated images is necessary in order to conduct inspections reliably. Therefore, in this paper, we propose a noise reduction method for super-resolution processing, and then report on the defect inspection performance when this super-resolution processing is implemented.