A membrane actuator based on piezo-polymer-composite technology

被引：0
|
作者：
Just, E [1 ]
Pustan, D [1 ]
Woias, P [1 ]
机构：
[1] Univ Freiburg, IMTEK Design Microsyst, D-79110 Freiburg, Germany
来源：
TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2005年
关键词：
piezo; polymer; composite; actuators; membrane actuator; valve;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
This paper presents the design, fabrication and characterization of a novel piezo-polymer-composite membrane actuator. Based on this membrane actuator, a valve for liquids and gases is presented as an application example. In measurements with water, the functionality of the valve was demonstrated for a pressure up to 650 hPa with a maximum flow of 1.5 1/h and a leak rate of less than 4 ml/h in the closed state. Moreover, a novel low-cost fabrication technology was developed that combines laser micromachining and polymer insert casting.
引用
收藏
页码：753 / 756
页数：4
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