Generalized model of resonant polymer-coated microcantilevers in viscous liquid media

被引:14
作者
Cox, Russell [1 ,2 ]
Josse, Fabien [1 ,2 ]
Wenzel, Michael J. [1 ,2 ]
Heinrich, Stephen M. [3 ]
Dufour, Isabelle [4 ]
机构
[1] Marquette Univ, Microsensor Res Lab, Milwaukee, WI 53223 USA
[2] Marquette Univ, Dept Elect & Comp Engn, Milwaukee, WI 53223 USA
[3] Marquette Univ, Dept Civil & Environm Engn, Milwaukee, WI 53201 USA
[4] Univ Bordeaux 1, CNRS, IMS Lab, F-33405 Talence, France
关键词
D O I
10.1021/ac800269x
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Expressions describing the resonant frequency and quality factor of a dynamically driven, polymer-coated microcantilever in a viscous liquid medium have been obtained. These generalized formulas are used to describe the effects the operational medium and the viscoelastic coating have on the device sensitivity when used in liquid-phase chemical sensing applications. Shifts in the resonant frequency are normally assumed proportional to the mass of sorbed analyte in the sensing layer. However, the expression for the frequency shift derived in this work indicates that the frequency shift is also dependent on changes in the sensing layer's loss and storage moduli, changes in the moment of inertia, and changes in the medium of operation's viscosity and density. Not accounting for these factors will lead to incorrect analyte concentration. predictions. The derived expressions are shown to reduce to well-known formulas found in the literature for the case of an uncoated cantilever in a viscous liquid medium and the case of a coated cantilever in air or in a vacuum. The theoretical results presented are then compared to available chemical sensor data in aqueous and viscous solutions.
引用
收藏
页码:5760 / 5767
页数:8
相关论文
共 17 条
[1]   Hydrodynamic loading of microcantilevers vibrating in viscous fluids [J].
Basak, Sudipta ;
Raman, Arvind ;
Garimella, Suresh V. .
JOURNAL OF APPLIED PHYSICS, 2006, 99 (11)
[2]   Design and performance of a microcantilever-based hydrogen sensor [J].
Baselt, DR ;
Fruhberger, B ;
Klaassen, E ;
Cemalovic, S ;
Britton, CL ;
Patel, SV ;
Mlsna, TE ;
McCorkle, D ;
Warmack, B .
SENSORS AND ACTUATORS B-CHEMICAL, 2003, 88 (02) :120-131
[3]   Environmental sensors based on micromachined cantilevers with integrated read-out [J].
Boisen, A ;
Thaysen, J ;
Jensenius, H ;
Hansen, O .
ULTRAMICROSCOPY, 2000, 82 (1-4) :11-16
[4]   Theoretical analysis of strong-axis bending mode vibrations for resonant microcantilever (bio)chemical sensors in gas or liquid phase [J].
Dufour, Isabelle ;
Heinrich, Stephen M. ;
Josse, Fabien .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (01) :44-49
[5]   Effect of coating viscoelasticity on quality factor and limit of detection of microcantilever chemical sensors [J].
Dufour, Isabelle ;
Lochon, Frederic ;
Heinrich, Stephen A. ;
Josse, Fabien ;
Rebiere, Dominique .
IEEE SENSORS JOURNAL, 2007, 7 (1-2) :230-236
[6]  
FERRY J, 1980, VISCOSELASTIC PROPER, P606
[7]   Analysis of liquid-phase chemical detection using guided shear horizontal-surface acoustic wave sensors [J].
Li, ZH ;
Jones, Y ;
Hossenlopp, J ;
Cernosek, R ;
Josse, F .
ANALYTICAL CHEMISTRY, 2005, 77 (14) :4595-4603
[8]  
Lindholm U.S., 1965, J. Ship Res., V9, P11
[9]   Silicon made resonant microcantilever:: Dependence of the chemical sensing performances on the sensitive coating thickness [J].
Lochon, F ;
Fadel, L ;
Dufour, I ;
Rebière, D ;
Pistré, J .
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2006, 26 (2-3) :348-353
[10]   Moore's law in homeland defense: An integrated sensor platform based on silicon microcantilevers [J].
Pinnaduwage, LA ;
Ji, HF ;
Thundat, T .
IEEE SENSORS JOURNAL, 2005, 5 (04) :774-785