Ultraviolet-Light-Induced Desorption of Oxygen from SrTiO3 Surfaces

被引:5
作者
Hara, Toru [1 ,2 ]
Ishiguro, Takashi [2 ]
Shinozaki, Kazuo [1 ]
机构
[1] Tokyo Inst Technol, Grad Sch Sci & Engn, Dept Met & Ceram Sci, Meguro Ku, Tokyo 1528550, Japan
[2] Taiyo Yuden Co Ltd, Res & Dev Lab, Corp Technol Planning Dept, Gunma 3708522, Japan
关键词
SCANNING-TUNNELING-MICROSCOPY; STRONTIUM-TITANATE; THIN-FILMS; ELECTRONIC CONDUCTION; SMALL POLARONS; DOPED SRTIO3; ZIRCONIA; ELECTROLYTES; ABSORPTION; ADSORPTION;
D O I
10.1143/JJAP.50.041502
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have previously reported that SrTiO3-based thin films can be used to detect trace amounts of oxygen (e.g., down to 0.001 ppt). However, the SrTiO3 surfaces are highly active against oxygen adsorption. Therefore, the slow desorption response can affect the response speed of the sensors against the sudden change in oxygen concentration. We have reported that UV light irradiation is effective for accelerating oxygen desorption, and in this paper, we will show that the increase in the irradiation intensity of UV light can be an efficient way of improving the response speed. As an example, an apparent hysteresis in the sensor resistance versus oxygen concentration curve, which is shown after the UV irradiation at a low intensity, diminishes after the UV irradiation at a high intensity, even after short-lasting treatments. (C) 2011 The Japan Society of Applied Physics
引用
收藏
页数:6
相关论文
共 75 条
[31]   SrTiO3-based sensors for in situ monitoring of trace levels of oxygen [J].
Hara, Toru ;
Ishiguro, Takashi .
JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2010, 118 (1376) :300-304
[32]   SrTiO3-Based Microfabricated Oxygen Sensors [J].
Hara, Toru ;
Ishiguro, Takashi .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2009, 48 (09) :09KA171-09KA174
[33]   Oxygen sensitivity of perovskite-type dielectric thin films [J].
Hara, Toru ;
Ishiguro, Takashi ;
Wakiya, Naoki ;
Shinozaki, Kazuo .
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2009, 161 (1-3) :142-145
[34]   Oxygen sensitivity of SrTiO3 thin film prepared using atomic layer deposition [J].
Hara, Toru ;
Ishiguro, Takashi .
SENSORS AND ACTUATORS B-CHEMICAL, 2009, 136 (02) :489-493
[35]   Giant photo-induced dielectricity in SrTiO3 [J].
Hasegawa, T ;
Mouri, S ;
Yamada, Y ;
Tanaka, K .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 2003, 72 (01) :41-44
[36]   REPLICATE CORE LEVELS AS A PROBE OF VALENCE-FLUCTUATION MATERIALS [J].
HERBST, JF ;
WILKINS, JW .
PHYSICAL REVIEW LETTERS, 1979, 43 (23) :1760-1763
[37]   STUDIES OF POLARON MOTION .1. THE MOLECULAR-CRYSTAL MODEL [J].
HOLSTEIN, T .
ANNALS OF PHYSICS, 1959, 8 (03) :325-342
[38]   EXPERIMENTAL-EVIDENCE FOR RELAXED EXCITED-STATE IN POLARON ABSORPTION [J].
HUYBRECHTS, W ;
DEVREESE, J .
SOLID STATE COMMUNICATIONS, 1975, 17 (04) :401-404
[39]   Effect of water adsorption on microscopic friction force on SrTiO3(001) [J].
Iwahori, K ;
Watanabe, S ;
Kawai, M ;
Kobayashi, K ;
Yamada, H ;
Matsushige, K .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (06) :3223-3227
[40]   Force microscopy study of SrTiO3(001) surfaces with single atomic-layer steps [J].
Iwahori, K ;
Watanabe, S ;
Komeda, T ;
Kawai, M ;
Saito, K ;
Kuwahara, Y ;
Aono, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (6B) :3946-3948