Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window

被引：21

作者：

Bai, Yang ^{[1
]}

Lu, Yunfeng ^{[1
,2
,3
]}

Hu, Pengcheng ^{[1
]}

Wang, Gang ^{[4
]}

Xu, Jinxin ^{[5
]}

Zeng, Tao ^{[1
]}

Li, Zhengkun ^{[2
,3
]}

Zhang, Zhonghua ^{[2
,3
]}

Tan, Jiubin ^{[1
]}

机构：

[1] Harbin Inst Technol, Sch Elect Engn & Automat, Harbin 150080, Peoples R China

[2] Natl Inst Metrol, Beijing 100013, Peoples R China

[3] AQSIQ, Key Lab Elect Quantum Standard, Beijing 100029, Peoples R China

[4] Beihang Univ, Sch Instrumentat Sci & Optoelect Engn, Beijing 100191, Peoples R China

[5] Tsinghua Univ, Dept Elect Engn, Beijing 100084, Peoples R China

来源：

SENSORS | 2016年 / 16卷 / 05期

基金：

中国国家自然科学基金;

关键词：

capacitive sensor; length metrology; fringe effect; DISPLACEMENT SENSOR;

D O I：

10.3390/s16050680

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A simple differential capacitive sensor is provided in this paper to measure the absolute positions of length measuring systems. By utilizing a shield window inside the differential capacitor, the measurement range and linearity range of the sensor can reach several millimeters. What is more interesting is that this differential capacitive sensor is only sensitive to one translational degree of freedom (DOF) movement, and immune to the vibration along the other two translational DOFs. In the experiment, we used a novel circuit based on an AC capacitance bridge to directly measure the differential capacitance value. The experimental result shows that this differential capacitive sensor has a sensitivity of 2 x 10(-4) pF/mu m with 0.08 mu m resolution. The measurement range of this differential capacitive sensor is 6 mm, and the linearity error are less than 0.01% over the whole absolute position measurement range.

引用

页数：9

共 24 条

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