Low temperature TiO2 rutile phase thin film synthesis by chemical spray pyrolysis (CSP) of titanyl acetylacetonate

被引：28

作者：

Raj, A. Moses Ezhil ^{[1
]}

Agnes, V. ^{[1
]}

Jothy, V. Bena ^{[2
]}

Sanjeeviraja, C. ^{[3
]}

机构：

[1] Scott Christian Coll Autonomous, Dept Phys, Nagercoil 629003, India

[2] Womens Christian Coll, Dept Phys, Nagercoil 629001, India

[3] Alagappa Univ, Dept Phys, Karaikkudi 630003, Tamil Nadu, India

来源：

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2010年 / 13卷 / 5-6期

关键词：

Thin films; Thermal analysis; Structural; FTIR; SEM;

D O I：

10.1016/j.mssp.2011.05.005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Rutile phase TiO2 thin films have been synthesized using chemical spray pyrolysis of titanyl acetylacetonate TiAcAc in ethanol at 500 degrees C. The first part of the paper focuses on the thermal decomposition behavior of the precursor by simultaneous thermogravimetry and differential thermal analysis (TG/DTA) coupled with differential scanning calorimetry (DSC). The second part of the paper focuses on the evolution of TiO2 thin films and their structural transformation with substrate temperature. XRD revealed amorphous TiO2 thin film at low substrate temperatures ( < 350 degrees C) and on high substrate temperatures anatase (3.84 g/cm(3)) or rutile (4.25 g/cm(3)) crystalline structure was obtained. The lattice constant, grain size, microstrain and the dislocation density of the film were obtained from the peak width. FTIR spectra of both anatase and rutile TiO2 revealed stretching vibration of the Ti-O bond for tetrahedral and octahedral surroundings of the titanium atom. Scanning electron micrograph showed the compactness of the rutile film. (C) 2011 Elsevier Ltd. All rights reserved.

引用

页码：389 / 394

页数：6

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