Transmission x-ray microscopy with 50 nm resolution installed at Ritsumeikan Synchrotron Radiation Center

被引:21
作者
Hirai, A
Takemoto, K
Nishino, K
Niemann, B
Hettwer, M
Rudolph, D
Anderson, E
Attwood, D
Kern, DP
Nakayama, Y
Kihara, H
机构
[1] Ritsumeikan Univ, Dept Phys, Kusatsu, Shiga 5258577, Japan
[2] Kansai Med Univ, Phys Lab, Hirakata, Osaka 5731136, Japan
[3] Univ Gottingen, Forschungseinrichtung Rontgenphys, D-37073 Gottingen, Germany
[4] Univ Calif Berkeley, Lawrence Berkeley Lab, Ctr Xray Opt, Berkeley, CA 94720 USA
[5] Univ Tubingen, Inst Angew Phys, Tubingen 1, Germany
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1999年 / 38卷 / 1A期
关键词
transmission x-ray microscopy; zone plate; Rits SR Center; back-illuminated CCD;
D O I
10.1143/JJAP.38.274
中图分类号
O59 [应用物理学];
学科分类号
摘要
A transmission X-ray microscope having two zone plates has been developed at BL-12, Ritsumeikan Synchrotron Radiation Center (Rits SR Center). By incorporating a new: type of condenser zone plate (diameter 9 mm, zone number41,890; outermost zone width 53.7 nm) in the microscope, 50 nm resolution has been obtained from both knife edge test and star test pattern at a wavelength of 3.2 nm, and for diatoms, the 0.1 mu m inner structures have been clearly resolved.
引用
收藏
页码:274 / 278
页数:5
相关论文
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