Effects of ZnO buffer layer on the optoelectronic performances of GZO films

被引：33

作者：

Hsu, Chun-Yao ^{[1
]}

Tsang, Chih-Hao ^{[1
]}

机构：

[1] Lunghwa Univ Sci & Technol, Dept Mech Engn, Tao Yuan 33306, Taiwan

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 2008年 / 92卷 / 05期

关键词：

GZO; ZnO buffer layer; annealing; magnetron sputtering; grey relational;

D O I：

10.1016/j.solmat.2007.11.013

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Gallium-doped zinc oxide (ZnO:Ga = 97:3 wt%, GZO) transparent conducting films have been deposited on glass substrates (Corning 1737F), with and without ZnO buffer layers by radio-frequency (r.f.) magnetron sputtering. The effect of ZnO buffer layer deposition parameters on electrical, structural, morphological and optical properties of GZO films (GZO/ZnO/glass) was investigated. The optimization of coating process parameters (r.f. power, sputtering pressure, thickness, annealing) on ZnO buffer layer with multiple qualities based on the orthogonal array has been studied. The electrical resistivity and the average transmittance of the GZO/ZnO/glass films were improved by annealing in vacuum ambient of the ZnO buffer layer. Findings based on the grey relational analysis show that the lowest electrical resistivity of GZO/ZnO/glass films to be about 9.45 x 10(-4) Omega m, and visible range transmittance about 85%. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：530 / 536

页数：7

共 18 条

[1] HIGHLY CONDUCTIVE AND TRANSPARENT GA-DOPED EPITAXIAL ZNO FILMS ON SAPPHIRE BY CVD [J].

ATAEV, BM ;

BAGAMADOVA, AM ;

DJABRAILOV, AM ;

MAMEDOV, VV ;

RABADANOV, RA .

THIN SOLID FILMS, 1995, 260 (01) :19-20

[2] Electrical and optical studies of ZnO:Ga thin films fabricated via the sol-gel technique [J].

Cheong, KY ;

Muti, N ;

Ramanan, SR .

THIN SOLID FILMS, 2002, 410 (1-2) :142-146

[3] Large area ZnO films optimized for graded band-gap Cu(InGa)Se-2-based thin-film mini-modules [J].

Cooray, NF ;

Kushiya, K ;

Fujimaki, A ;

Sugiyama, I ;

Miura, T ;

Okumura, D ;

Sato, M ;

Ooshita, M ;

Yamase, O .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1997, 49 (1-4) :291-297

[4]

Deng Julong, 1989, Journal of Grey Systems, V1, P1

[5] Growth of ZnO:Ga thin films at room temperature on polymeric substrates:: thickness dependence [J].

Fortunato, E ;

Gonçalves, A ;

Assunçao, V ;

Marques, A ;

Aguas, H ;

Pereira, L ;

Ferreira, I ;

Martins, R .

THIN SOLID FILMS, 2003, 442 (1-2) :121-126

[6] Molecular beam epitaxy growth of ZnO using initial Zn layer and MgO buffer layer on Si(111) substrates [J].

Fujita, M ;

Kawamoto, N ;

Sasajima, M ;

Horikoshi, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (03) :1484-1486

[7] ALUMINUM-DOPED AND INDIUM-DOPED ZINC-OXIDE THIN-FILMS PREPARED BY DC MAGNETRON REACTIVE SPUTTERING [J].

HARDING, GL ;

WINDOW, B ;

HORRIGAN, EC .

SOLAR ENERGY MATERIALS, 1991, 22 (01) :69-91

[8] Milling of MAR-M247 nickel-based superalloy with high temperature and ultrasonic aiding [J].

Hsu, C. Y. ;

Huang, C. K. ;

Wu, C. Y. .

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2007, 34 (9-10) :857-866

[9] The role of a ZnO buffer layer in the growth of ZnO thin film on Al2O3 substrate [J].

Kang, Hong Seong ;

Pang, Seong Sik ;

Kim, Jae Won ;

Kim, Gun Hee ;

Kim, Jong Hoon ;

Lee, Sang Yeol ;

Li, Y. ;

Wang, H. ;

Jia, Q. X. .

SUPERLATTICES AND MICROSTRUCTURES, 2006, 40 (4-6) :501-506

[10] Fill factor losses in ZnO/CdS/CuGaSe2 single-crystal solar cells [J].

Kassis, A ;

Saad, M .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2003, 80 (04) :491-499

← 1 2 →