Photosensitive sol-gel preparation and micro-patterning of (100)-oriented (Ba0.7Sr0.3)TiO3 film on LaNiO3 electrode

Using La(NO3)(3)center dot nH(2)O and Ni(CH3COO)(2)center dot 4H(2)O as starting materials, the LaNiO3 sol was prepared with 2-methoxyethanol as solvent. Using this sol, (001)-oriented LNO films with high conductivity were prepared on LaAlO3 single crystal substrate by sol-gel method. Using barium acetate, strontium acetate, and Ti(OC4H9)(4) as starting materials, acetylacetone and lactic acid as chemical modifiers, photosensitive BST sol was obtained. Using the BST sol, a-oriented BST films were prepared on (001)LNO/LAO. Due to the photosensitivity of the BST sol, the coated BST gel film itself can be used as photoresist. Thus, micro-patterned a-oriented BST films are obtained by exposing, leaching, and annealing the BST gel film. The a-oriented BST film capacitor on LNO/LAO has a high dielectric constant, a low dielectric loss and a low leakage current.