Fabrication of large-scale ultra-smooth metal surfaces by a replica technique

被引:37
|
作者
Diebel, J
Löwe, H
Samorí, P
Rabe, JP
机构
[1] Inst Mikrotech Mainz GmbH, D-55129 Mainz, Germany
[2] Humboldt Univ, Inst Phys, D-10115 Berlin, Germany
来源
关键词
D O I
10.1007/s003390100935
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper describes the growth and characterization of large-scale ultra-smooth metal surfaces produced by an adapted replica technique. Making use of this method, either amorphous or crystalline masters of different materials with ultra-flat surfaces, e.g. mica, glass or polymer coatings on silicon, were coated by a physical vapor deposition (PVD) process with a thin precious-metal layer. On the top of this layer a thick Ni surface was grown by electroplating. Both the precious-metal layer and the nickel reinforcement can be stripped off from the master, and the free metal surface that is made to appear can be used as a substrate for the self-assembly of molecules, mostly via chemisorption of thiol-functionalized moieties. The use of either gold or silver layers led to films exhibiting different morphologies and roughnesses, which are all strongly influenced by the structure of the master's surface and by the conditions during the PVD-coating procedure. Utilizing mica as a master it was possible to grow Ag and Au surfaces made of ultra-smooth well-defined [111]-oriented crystals. A root mean square roughness down to 0.2 nm was measured over micrometer-sized areas by scanning tunneling microscopy. Very flat An and Ag films have been also produced using the amorphous masters.
引用
收藏
页码:273 / 279
页数:7
相关论文
共 50 条
  • [31] A Novel Polishing Process for Ultra-Smooth Aluminum Surfaces via Anodizing in Sodium Metaborate
    Iwai, Mana
    Kikuchi, Tatsuya
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2023, 170 (07)
  • [32] Ultra-smooth platinum surfaces for nanoscale devices fabricated using chemical mechanical polishing
    M. Saif Islam
    G.Y. Jung
    T. Ha
    D.R. Stewart
    Y. Chen
    S.Y. Wang
    R. Stanley Williams
    Applied Physics A, 2005, 80 : 1385 - 1389
  • [33] Fabrication and Characterization of Micrometer Scale Graphene Structures for Large-Scale Ultra-Thin Electronics
    Planillo, Jordan
    Alves, Fabio
    ELECTRONICS, 2022, 11 (05)
  • [34] Rapid characterization of nano-scale structures in large-scale ultra-precision surfaces
    Yang, Wenjun
    Liu, Xiaojun
    Hu, Chi
    Lu, Wenlong
    Chen, Cheng
    Yao, Zhenjian
    Lei, Zili
    OPTICS AND LASERS IN ENGINEERING, 2020, 134 (134)
  • [35] Large-scale structures produced on metal surfaces by multiple laser pulses
    Kirichenko, N. A.
    QUANTUM ELECTRONICS, 2009, 39 (05) : 442 - 448
  • [36] Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins
    Pfeiffer, Martin H. P.
    Liu, Junqiu
    Raja, Arslan S.
    Morais, Tiago
    Ghadiani, Bahareh
    Kippenberg, Tobias J.
    OPTICA, 2018, 5 (07): : 884 - 892
  • [37] Thermal-induced durable superhydrophilicity of TiO2 films with ultra-smooth surfaces
    Li, Yuanyang
    Xia, Bibo
    Jiang, Bo
    JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2018, 87 (01) : 50 - 58
  • [38] Design of the atmospheric pressure low temperature plasma polishing system for the machining of ultra-smooth surfaces
    Zhang, Ju-Fan
    Wang, Bo
    Dong, Shen
    Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering, 2008, 6 (03): : 222 - 226
  • [39] Wettability influence on the onset temperature of pool boiling: Experimental evidence onto ultra-smooth surfaces
    Bourdon, B.
    Bertrand, E.
    Di Marco, P.
    Marengo, M.
    Rioboo, R.
    De Coninck, J.
    ADVANCES IN COLLOID AND INTERFACE SCIENCE, 2015, 221 : 34 - 40
  • [40] Surface engineering with ion beams: from self-organized nanostructures to ultra-smooth surfaces
    F. Frost
    B. Ziberi
    A. Schindler
    B. Rauschenbach
    Applied Physics A, 2008, 91 : 551 - 559