MEMS optical switch control and integrated packaging

被引：0

作者：

Cai, H ^{[1
]}

Chan, CW ^{[1
]}

Wang, YX ^{[1
]}

Lu, C ^{[1
]}

Asundi, A ^{[1
]}

Liu, AQ ^{[1
]}

机构：

[1] Inst Infocomm Res, U230, Innovat Ctr, Singapore 637723, Singapore

来源：

MICROSYSTEMS ENGINEERING: METROLOGY AND INSPECTION III | 2003年 / 5145卷

关键词：

MEMS; optical switch; digital control;

D O I：

10.1117/12.500339

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A digital control system implemented to operate the Microelectromechanical system (MEMS) optical switch is described. This MEMS switch is based on a voltage-controlled moving-mirror structure to control the optical path connections and optical power levels. The tiny MEMS devices may replace bulk optical-mechanical devices in lightwave equipment, and enable new functions not available from conventional devises. Here, by use of the proportional integral (PI) control system, each switch module functions either as a reflective optical switch or a variable attenuator. Moreover, this control system promises to improve the performance of the device, as well as make possible the monolithic integration packaging of MEMS with driving, controlling and signal processing electronics. One more attraction of this control system is its programmability. The rest of the paper describes the control system and experimental results for this MEMS optical switch.

引用

页码：62 / 68

页数：7

共 50 条

[21] Integrated Polymeric All-Optical Switch [J].

Parsanasab, Gholam-Mohammad ;

Sharbati, Mohammad Taghi ;

Karimi-Alavijeh, Hamid Reza ;

Soltani, Soheil ;

Gharavi, Alireza .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2011, 29 (18) :2801-2804

[22] Designing the drive scheme of the silicon-based MEMS torsion-mirror optical switch [J].

Yin, DQ ;

Lin, JH ;

Chen, QH ;

Chen, ZY ;

Xu, AS ;

Wu, WG .

SEMICONDUCTOR AND ORGANIC OPTOELECTRONIC MATERIALS AND DEVICES, 2005, 5624 :604-609

[23] Optical MEMS [J].

Fujita, H ;

Toshiyoshi, H .

IEICE TRANSACTIONS ON ELECTRONICS, 2000, E83C (09) :1427-1434

[24] A WDM capable integrated optical readout of a MEMS sensor [J].

Putrino, G. ;

Martyniuk, M. ;

Keating, A. ;

Faraone, L. ;

Dell, J. M. .

26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 2012, 47 :386-389

[25] Packaging technology in MEMS [J].

Shi, YB ;

Liu, J ;

Zhang, WD .

ISTM/2003: 5TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-6, CONFERENCE PROCEEDINGS, 2003, :175-178

[26] Packaging of MEMS Microphones [J].

Feiertag, Gregor ;

Winter, Matthias ;

Leidl, Anton .

SMART SENSORS, ACTUATORS, AND MEMS IV, 2009, 7362

[27] A 2 x 2 Mechanical Optical Switch With a Thin MEMS Mirror [J].

Fan, Kuang-Chao ;

Lin, Wu-Lang ;

Chiang, Li-Hung ;

Chen, Shou-Heng ;

Chung, Tien-Tung ;

Yang, Yao-Joe .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2009, 27 (09) :1155-1161

[28] Low-insertion-loss optical matrix switch using MEMS micromirrors assembled by passive alignment [J].

Kazama, A ;

Itou, Y ;

Horino, M ;

Fukuda, K ;

Kanamaru, M ;

Akashi, T ;

Ishikawa, T ;

Harada, T ;

Okada, R .

JSME INTERNATIONAL JOURNAL SERIES B-FLUIDS AND THERMAL ENGINEERING, 2004, 47 (03) :501-507

[29] Integrated optical switch matrices for packet data networks [J].

Stabile, Ripalta ;

Albores-Mejia, Aaron ;

Rohit, Abhinav ;

Williams, Kevin A. .

MICROSYSTEMS & NANOENGINEERING, 2016, 2

[30] A novel integrated multistage optical MEMS-mirror switch architecture design with shuffle Benes inter-stage connecting principle [J].

Ma, XH ;

Kuo, GS .

OPTICS COMMUNICATIONS, 2004, 242 (1-3) :179-189

← 1 2 3 4 5 →