Performance evaluation of a trace-moisture analyzer based on cavity ring-down spectroscopy: Direct comparison with the NMIJ trace-moisture standard

被引:34
作者
Abe, Hisashi [1 ]
Yamada, Koichi M. T. [2 ]
机构
[1] AIST, Natl Metrol Inst Japan NMIJ, Tsukuba, Ibaraki 3058563, Japan
[2] AIST, Inst Environm Management Technol EMTech, Tsukuba, Ibaraki 3058569, Japan
关键词
Diffusion tube; Humidity standard; Measurement performance; Metrological traceability; Sensor test; Standard gas; MASS-FLOW RATES; ABSORPTION-SPECTROSCOPY; H2O; SPECTROMETER; UNCERTAINTY; GENERATION; NOZZLES;
D O I
10.1016/j.sna.2010.11.005
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The performance of a moisture analyzer (MA) based on cavity ring-down spectroscopy (CRDS) was evaluated by direct comparison with the primary trace-moisture standard developed at the National Metrology Institute of Japan (NMIJ). The limit of detection for trace moisture in nitrogen gas by the CRDS-based MA, expressed in amount fraction (mole fraction), was estimated to be 1 nmol mol(-1) or less. The CRDS-based MA showed excellent performance in terms of linearity, accuracy, time response, stability, and reproducibility over four years. It was found for a moderate range of pressures and temperatures that we can measure trace moisture in nitrogen gas with a relative standard uncertainty of approximately 4% down to approximately 10 nmol mol(-1), even using a simple CRDS-based MA that measures only the peak intensity of the absorption line, provided that the MA is properly calibrated on the basis of a reliable trace-moisture standard. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:230 / 238
页数:9
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