Layer thickness error dependence of the laser-induced damage threshold of multilayer mirrors for high-power lasers

We clarified experimentally that layer thickness error significantly affects the laser-induced damage threshold (LIDT) of multilayer laser mirrors. The layer thickness error causes a shift of the maximum-reflectance wavelength (lambda(c)) of the mirror from the design wavelength (=laser wavelength lambda(0)). The shift Deltalambda (= lambda(c) = lambda(0)) dependence of the LIDTs of the dielectric multilayer mirrors for 1053, 527, and 355 nm lasers was measured. The LIDT decreased as the \DeltaX\ increased and was laserwavelength dependent.