A Low-Voltage, Low-Current, Digital-Driven MEMS Mirror for Low-Power LiDAR

被引：28
作者：
Wang, Dingkang [1 ]
Thomas, Lenworth [2 ]
Koppal, Sanjeev [1 ]
Ding, Yingtao [3 ]
Xie, Huikai [3 ]
机构：
[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA
[2] Univ Florida, Dept Mech & Aerosp Engn, Gainesville, FL 32611 USA
[3] Beijing Inst Technol, Sch Informat & Elect, Beijing 100081, Peoples R China
来源：
IEEE SENSORS LETTERS | 2020年 / 4卷 / 08期
关键词：
Sensor-actuators; electrothermal actuator; LiDAR; microelectromechanical (MEMS) mirror;
D O I：
10.1109/LSENS.2020.3006813
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Microelectromechanical (MEMS) mirrors have provided a fast and compact method to modulate light for mobile-scale projectors, LiDAR, and computational cameras. In this letter, we propose a new MEMS mirror design and its actuation method that is specifically built for low-voltage, low-current, and digital-driven IoT applications. The MEMS mirror specifically designed with direct actuation from the microcontroller was successfully fabricated and characterized. A full low-power LiDAR system based on the fabricated MEMS mirror was demonstrated, which was powered by a 9-V commercial battery.
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页数：4
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