Extraordinary transmission through a poly-SiC membrane with subwavelength hole arrays

被引：1
|
作者：
Provine, J. [1 ]
Catrysse, Peter B. [1 ]
Roper, Christopher [2 ]
Maboudian, Roya [2 ]
Fan, Shanhui [1 ]
Howe, Roger T. [1 ]
机构：
[1] Stanford Univ, Dept Elect Engn, 127X Allen CIS Bldg, Stanford, CA 94305 USA
[2] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA
来源：
2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2007年
关键词：
optical MEMS; plasmonics; silicon carbide; infra red spectroscopy;
D O I：
10.1109/OMEMS.2007.4373888
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on the experimental observation of extraordinary transmission (similar to 50% for 25% fill factor) in the infrared through a suspended polycrystalline silicon carbide (poly-SiC) membrane into which is etched a subwavelength hole array. The poly-SiC was deposited by low pressure chemical vapor deposition (LPCVD), patterned with contact photolithography, and etched by reactive ion etching (RIE). Simulation of the mid-infrared transmission is broadly consistent with measurements.
引用
收藏
页码：157 / +
页数：2
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