Extraordinary transmission through a poly-SiC membrane with subwavelength hole arrays

被引：1

作者：

Provine, J. ^{[1
]}

Catrysse, Peter B. ^{[1
]}

Roper, Christopher ^{[2
]}

Maboudian, Roya ^{[2
]}

Fan, Shanhui ^{[1
]}

Howe, Roger T. ^{[1
]}

机构：

[1] Stanford Univ, Dept Elect Engn, 127X Allen CIS Bldg, Stanford, CA 94305 USA

[2] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA

来源：

2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2007年

关键词：

optical MEMS; plasmonics; silicon carbide; infra red spectroscopy;

D O I：

10.1109/OMEMS.2007.4373888

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the experimental observation of extraordinary transmission (similar to 50% for 25% fill factor) in the infrared through a suspended polycrystalline silicon carbide (poly-SiC) membrane into which is etched a subwavelength hole array. The poly-SiC was deposited by low pressure chemical vapor deposition (LPCVD), patterned with contact photolithography, and etched by reactive ion etching (RIE). Simulation of the mid-infrared transmission is broadly consistent with measurements.

引用

页码：157 / +

页数：2

共 50 条

[21] The influence of hole shape on enhancing transmission through subwavelength hole arrays
Sun Mei
Liu Rong-Juan
Li Zhi-Yuan
Cheng Bing-Ying
Zhang Dao-Zhong
Yang Hai-Fang
Jin Ai-Zi
CHINESE PHYSICS, 2006, 15 (07): : 1591 - 1594
[22] Theory of extraordinary transmission of light through quasiperiodic arrays of subwavelength holes
Bravo-Abad, J.
Fernandez-Dominguez, A. I.
Garcia-Vidal, F. J.
Martin-Moreno, L.
PHYSICAL REVIEW LETTERS, 2007, 99 (20)
[23] Transmission of optical and terahertz radiation through subwavelength hole arrays
Sydorchuk, Natalia
DIPED 2007: DIRECT AND INVERSE PROBLEMS OF ELECTROMAGNETIC AND ACOUSTIC WAVE THEORY, 2007, : 170 - 173
[24] The role of periodicity in enhanced transmission through subwavelength hole arrays
Sun, M
Tian, J
Li, ZY
Cheng, BY
Zhang, DZ
Jin, AZ
Yang, HF
CHINESE PHYSICS LETTERS, 2006, 23 (02) : 486 - 488
[25] The Role of Periodicity in Enhanced Transmission through Subwavelength Hole Arrays
Sunmei
Guopeiyuan
Xingsuxia
Xiaohongbing
Xudegang
2010 INTERNATIONAL CONFERENCE ON DISPLAY AND PHOTONICS, 2010, 7749
[26] Theory of light transmission through subwavelength periodic hole arrays
Popov, E
Nevière, M
Enoch, S
Reinisch, R
PHYSICAL REVIEW B, 2000, 62 (23): : 16100 - 16108
[27] Complete polarimetry on the asymmetric transmission through subwavelength hole arrays
Arteaga, Oriol
Maoz, Ben M.
Nichols, Shane
Markovich, Gil
Kahr, Bart
OPTICS EXPRESS, 2014, 22 (11): : 13719 - 13732
[28] Effect of a vertical stack of aligned subwavelength metal hole arrays on extraordinary transmission spectra
Provine, J.
Kant, Rishi
Horsley, David A.
Howe, Roger T.
2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 2007, : 117 - +
[29] Effects of hole depth on enhanced light transmission through subwavelength hole arrays
Degiron, A
Lezec, HJ
Barnes, WL
Ebbesen, TW
APPLIED PHYSICS LETTERS, 2002, 81 (23) : 4327 - 4329
[30] Extraordinary optical transmission through a subwavelength composite hole-pillar array
Shao Wei-Jia
Li Wei-Min
Xu Xiao-Liang
Wang Hui-Jie
Wu Yi-Zhi
Yu Jing
CHINESE PHYSICS B, 2014, 23 (11)

← 1 2 3 4 5 →