Extraordinary transmission through a poly-SiC membrane with subwavelength hole arrays

被引：1

作者：

Provine, J. ^{[1
]}

Catrysse, Peter B. ^{[1
]}

Roper, Christopher ^{[2
]}

Maboudian, Roya ^{[2
]}

Fan, Shanhui ^{[1
]}

Howe, Roger T. ^{[1
]}

机构：

[1] Stanford Univ, Dept Elect Engn, 127X Allen CIS Bldg, Stanford, CA 94305 USA

[2] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA

来源：

2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2007年

关键词：

optical MEMS; plasmonics; silicon carbide; infra red spectroscopy;

D O I：

10.1109/OMEMS.2007.4373888

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the experimental observation of extraordinary transmission (similar to 50% for 25% fill factor) in the infrared through a suspended polycrystalline silicon carbide (poly-SiC) membrane into which is etched a subwavelength hole array. The poly-SiC was deposited by low pressure chemical vapor deposition (LPCVD), patterned with contact photolithography, and etched by reactive ion etching (RIE). Simulation of the mid-infrared transmission is broadly consistent with measurements.

引用

页码：157 / +

页数：2

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