Growth of carbon nanotubes with resist-assisted patterning process

被引：82

作者：

Park, Kyu Chang ^{[1
]}

Ryu, Je Hwang ^{[1
]}

Kim, Ki Seo ^{[1
]}

Yu, Yi Yin ^{[1
]}

Jang, Jin ^{[1
]}

机构：

[1] Kyung Hee Univ, Adv Display Res Ctr, Dept Informat Display, Seoul 130701, South Korea

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2007年 / 25卷 / 04期

关键词：

D O I：

10.1116/1.2752513

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors developed a growth method for carbon nanotubes (CNTs) by using a resist-assisted patterning process. The CNTs can be grown directly on the patterned catalyst surface without a diffusion barrier. The growth-site patterns were fabricated on a nickel/silicon (Ni/Si) substrate by a conventional lithography method using a photopatternable resist. The growth mechanism of the CNTs without diffusion barrier was confirmed by Raman spectroscopy and transmission-electron microscope measurement. The carbon-network formation during forming the process is a key parameter for CNT growth. The technique will be applicable to a low-cost fabrication process of electron-emitter arrays. (c) 2007 American Vacuum Society.

引用

页码：1261 / 1264

页数：4

共 11 条

[1] Field emission properties of carbon nanotube arrays through the pattern transfer process [J].

Chiu, Chien-Chao ;

Tsai, Tsung-Yen ;

Tai, Nyan-Hwa .

NANOTECHNOLOGY, 2006, 17 (12) :2840-2844

[2] Patterned growth of well-aligned carbon nanotubes: A soft-lithographic approach [J].

Huang, SM ;

Mau, AWH ;

Turney, TW ;

White, PA ;

Dai, LM .

JOURNAL OF PHYSICAL CHEMISTRY B, 2000, 104 (10) :2193-2196

[3] HELICAL MICROTUBULES OF GRAPHITIC CARBON [J].

IIJIMA, S .

NATURE, 1991, 354 (6348) :56-58

[4] Single standing carbon nanotube array in gate holes using a silicon nitride cap layer [J].

Lim, SH ;

Yoon, HS ;

Moon, JH ;

Park, KC ;

Jang, J .

APPLIED PHYSICS LETTERS, 2005, 87 (24) :1-3

[5] Optical emission spectroscopy study for optimization of carbon nanotubes growth by a triode plasma chemical vapor deposition [J].

Lim, SH ;

Yoon, HS ;

Moon, JH ;

Park, KC ;

Jang, J .

APPLIED PHYSICS LETTERS, 2006, 88 (03) :1-3

[6] Controlled density of vertically aligned carbon nanotubes in a triode plasma chemical vapor deposition system [J].

Lim, Sung Hoon ;

Park, Kyu Chang ;

Moon, Jong Hyun ;

Yoon, Hyun Sik ;

Pribat, Didier ;

Bonnassieux, Yvan ;

Jang, Jin .

THIN SOLID FILMS, 2006, 515 (04) :1380-1384

[7] Room-temperature fabrication of high-resolution carbon nanotube field-emission cathodes by self-assembly [J].

Oh, SJ ;

Cheng, Y ;

Zhang, J ;

Shimoda, H ;

Zhou, O .

APPLIED PHYSICS LETTERS, 2003, 82 (15) :2521-2523

[8]

Park KC, 2004, J KOREAN PHYS SOC, V45, pS833

[9] Field emission from carbon nanotubes and its application to cathode ray tube lighting elements [J].

Saito, Y ;

Hamaguchi, K ;

Mizushima, R ;

Uemura, S ;

Nagasako, T ;

Yotani, J ;

Shimojo, T .

APPLIED SURFACE SCIENCE, 1999, 146 (1-4) :305-311

[10] Uniform patterned growth of carbon nanotubes without surface carbon [J].

Teo, KBK ;

Chhowalla, M ;

Amaratunga, GAJ ;

Milne, WI ;

Hasko, DG ;

Pirio, G ;

Legagneux, P ;

Wyczisk, F ;

Pribat, D .

APPLIED PHYSICS LETTERS, 2001, 79 (10) :1534-1536

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