Low-temperature low-pressure die attach with hybrid silver particle paste

被引:236
作者
Suganuma, K. [1 ]
Sakamoto, S. [1 ]
Kagami, N. [1 ]
Wakuda, D. [1 ]
Kim, K. -S. [1 ]
Nogi, M. [1 ]
机构
[1] Osaka Univ, ISIR, Osaka 5670047, Japan
关键词
SILICON-CARBIDE; POWER DEVICES; ELECTRONICS;
D O I
10.1016/j.microrel.2011.07.088
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
New types of die attach pastes comprising micron-sized Ag particles hybridized with submicron-sized Ag particles were considered as lead-free die attach materials for SiC power semiconductors. Micron-sized Ag particles in alcohol solvent were prepared by mixing the die attach paste with submicron-sized Ag particles. The alcohol vaporizes completely during sintering and no residue exists in the bonding layer. The Ag layer has a uniform porous structure. The electrical resistivity of the printed tracks decreases below 1 x 10(-5) Omega cm when sintered above 200 degrees C. When sintered at 200 degrees C for 30 min, the average resistivity reaches 5 x 10(-6) Omega cm, which is slightly higher than the value obtained by using Ag nanoparticle paste. A SiC die was successfully bonded to a direct bonded copper substrate and the die-shear strength gradually increases with the increase in bonding temperature up to 300 degrees C. The Ag die attach bond layer was stable against thermal cycles between -40 degrees C and 300 degrees C. (C) 2011 Elsevier Ltd. All rights reserved.
引用
收藏
页码:375 / 380
页数:6
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