Robustness of ultrathin aluminum oxide dielectrics on Si(001)

被引:115
作者
Copel, M [1 ]
Cartier, E [1 ]
Gusev, EP [1 ]
Guha, S [1 ]
Bojarczuk, N [1 ]
Poppeller, M [1 ]
机构
[1] IBM Corp, Div Res, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA
关键词
D O I
10.1063/1.1367902
中图分类号
O59 [应用物理学];
学科分类号
摘要
The stability of Al2O3 films during thermal processing will help determine their usefulness as an alternative gate dielectric for advanced complementary metal-oxide-semiconductor devices. We used medium energy ion scattering and atomic force microscopy to examine the degradation of ultrathin Al2O3 layers under ultrahigh vacuum annealing and the effects of low-temperature oxidation. No degradation is observed at 900 degreesC, but voids appear at higher temperatures. Growth of interfacial SiO2 takes place during low-pressure oxidation at 600 degreesC, which may limit the capacitance of extremely thin structures. (C) 2001 American Institute of Physics.
引用
收藏
页码:2670 / 2672
页数:3
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