Periodic silicon nanocone arrays with controllable dimensions prepared by two-step etching using nanosphere lithography and NH4OH/H2O2 solution

被引：10

作者：

Yang, Mingfei ^{[1
]}

Yu, HongYu ^{[1
]}

Sun, Xiaowei ^{[1
]}

Li, Junshuai ^{[1
]}

Li, Xiaocheng ^{[1
]}

Ke, Lin ^{[2
]}

Hu, Junhui ^{[1
]}

Wang, Fei ^{[1
]}

Jiao, Zhihui ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

[2] ASTAR, Inst Mat Res & Engn, Singapore 117602, Singapore

来源：

SOLID STATE COMMUNICATIONS | 2011年 / 151卷 / 02期

关键词：

Nanostructures; Nanofabrication; Light absorption and reflection; ION BATTERY ANODES; SOLAR-CELLS; NANOWIRE ARRAYS; FABRICATION; ABSORPTION; SI;

D O I：

10.1016/j.ssc.2010.11.007

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

An electroless chemical etching technique using polystyrene nanospheres as a self-assembled mask is developed to fabricate size-controllable, periodic silicon nanopillars (NPs) and subsequent nanocone (NC) arrays. The Si NCs are obtained based on the NPs structure using cost-effective ammonia-related etching chemistry. The diameter, height, and periodicity of the NCs can be systematically controlled. Optical measurement shows a good improvement in the reduction of reflectance properties with Si NCs structures. This method is potentially beneficial to many device applications including super-capacitors, batteries, solar cells, etc. (C) 2010 Elsevier Ltd. All rights reserved.

引用

页码：127 / 129

页数：3

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