Lapping and polishing process for obtaining super-smooth surfaces of quartz crystal

被引：27

作者：

Yuan, JL ^{[1
]}

Zhao, P ^{[1
]}

Ruan, J ^{[1
]}

Cao, ZX ^{[1
]}

Zhao, WH ^{[1
]}

Xing, T ^{[1
]}

机构：

[1] Zhejiang Univ Technol, Ctr Sci Res, Hangzhou 310014, Peoples R China

来源：

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY | 2003年 / 138卷 / 1-3期

关键词：

lapping and polishing; super-smooth surface; quartz crystal;

D O I：

10.1016/S0924-0136(03)00058-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The lapping and polishing processes to obtain the damage-free surfaces and Angstrom level surface roughness of quartz crystal is discussed and realized by adopting soft material polishers, fine abrasive powders, and suitable working environments, by taking account of the minimization of mechanical actions in polishing process. The material removal mechanism in the process of ultra-precision polishing is discussed, and the basic formation models of surface roughness are also put forward. A super-smooth surface of quartz crystal with 1-2 Angstrom level roughness have been obtained by adopting the SiO2 abrasive powders and the K3 pitch polisher in the experiments. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：116 / 119

页数：4