A new microvalve controlled by surface acoustic wave

被引：1
作者：
Liu, Wei-Yue [1 ]
Fu, Xiang-Ting [1 ]
Zhang, Xiao-Quan [2 ]
Hu, Wen-Yan [2 ]
机构：
[1] Ningbo Univ, Sch Informat Sci & Engn, Circuit & Syst Res Lab, 818 Fenghua Rd, Ningbo 315211, Zhejiang, Peoples R China
[2] Changzhou Inst Technol, Sch Elect & Photoelect Engn, Changzhou, Jiangsu, Peoples R China
来源：
FERROELECTRICS | 2017年 / 515卷 / 01期
关键词：
Surface acoustic wave; microvalve; microchannel; interdigital transducer; SMA wire; ENHANCED RAMAN-SPECTROSCOPY; LITHIUM-NIOBATE; QUANTUM DOTS; SERS; LUMINESCENCE; SCATTERING; NANOSCALE; NANOROD;
D O I：
10.1080/00150193.2017.1367241
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new microvalve controlled by surface acoustic wave was presented. A shape memory alloy (SMA) with plastic sheet was integrated into a printed circuit board by way of small copper pipe. A 128 degrees-YX LiNbO3 piezoelectric substrate was under the SMA wire with small gap. A polydimethylsiloxane (PDMS) microchannel was squeezed by the extension of the heated SMA wire due to surface acoustic wave radiation. The microvalve state was then changed. Experimental results show that the switching-off time of the microvalve is 39.533 s at 28.5 dBm electric signal power. The variation of SMA size during expansion is theoretically calculated.
引用
收藏
页码：149 / 156
页数：8
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