In Vivo 3D and Doppler OCT Imaging Using Electrothermal MEMS Scanning Mirrors

被引：0

作者：

Sun, Jingjing ^{[1
]}

Guo, Shuguang ^{[1
]}

Wu, Lei ^{[2
]}

Choe, Se-Woon ^{[3
]}

Sorg, Brian ^{[3
]}

Xie, Huikai ^{[1
]}

机构：

[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA

[2] WiOptix Inc, Gainesville, FL 32601 USA

[3] Univ Florida, Dept Biomed Engn, Gainesville, FL 32611 USA

来源：

MOEMS AND MINIATURIZED SYSTEMS IX | 2010年 / 7594卷

基金：

美国国家科学基金会;

关键词：

Endoscopy; optical coherence tomography; MEMS; optical MEMS; micromirrors; electrothermal actuation; optical imaging; OPTICAL COHERENCE TOMOGRAPHY; CANCER;

D O I：

10.1117/12.847237

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Most cancers occur inside human body, so endoscopic high-resolution imaging modalities are required for early cancer detection and surgical removal. This paper reports in vivo endoscopic 3D imaging based on optical coherence tomography (OCT). Endoscopic imaging is enabled by integrating rapid-scanning MEMS mirror into a miniature imaging probe. The MEMS mirror has an aperture size of 1 mm by 1 mm and a chip size of 2 mm by 2 mm. The optical scan angle exceeds +/- 25 V at 6 Vdc, and thus large, constant-velocity, linear scan can be realized. The outer diameter of the probe is only 5 mm. The axial resolution is about 10 mu m and the imaging speed is 2.5 frames per second. Doppler OCT imaging has also been demonstrated.

引用

页数：8

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