Planar Technology for NDT-Ge X-Ray Microcalorimeters: Absorber Fabrication

被引：4

作者：

Lo Cicero, U. ^{[1
,3
]}

Arnone, C. ^{[3
]}

Barbera, M. ^{[1
,2
]}

Collura, A. ^{[1
]}

Lullo, G. ^{[3
]}

Perinati, E. ^{[1
]}

Varisco, S. ^{[1
]}

机构：

[1] INAF OAPA, Piazza Parlamento 1, I-90134 Palermo, Italy

[2] Univ Palermo, DSFA, I-90123 Palermo, Italy

[3] Univ Palermo, DIEET, I-90128 Palermo, Italy

来源：

LOW TEMPERATURE DETECTORS LTD 13 | 2009年 / 1185卷

关键词：

Microcalorimeter array; NTD-Ge; Absorber; Planar Technology;

D O I：

10.1063/1.3292295

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have investigated the electroplating process to deposit thick uniform films of tin on a Ge wafer coated with Spin-On Glass, in order to fabricate the absorbers for Ge microcalorimeter arrays. Here we discuss some technological details and propose two alternative metal bilayer to be used as seed for the electroplating.

引用

页码：112 / +

页数：2

共 4 条

[1]

LOCICERO U, IEEE NUCL SCI S 2008

[2] Physics of low-temperature microcalorimeters [J].

McCammon, D .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2004, 520 (1-3) :11-15

[3] An NTD germanium-based microcalorimeter with 3.1 eV energy resolution at 6 keV [J].

Silver, E ;

Austin, G ;

Beeman, J ;

Goulding, F ;

Haller, EE ;

Landis, D ;

Madden, N .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2005, 545 (03) :683-689

[4]

Silver E, 2002, AIP CONF PROC, V605, P555, DOI 10.1063/1.1457708

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