Drop-coated metal-oxide gas sensor on polyimide foil with reduced power consumption for wireless applications

被引:44
作者
Courbat, J. [1 ]
Briand, D. [1 ]
Yue, L. [2 ]
Raible, S. [2 ]
de Rooij, N. F. [1 ]
机构
[1] IMT, EPFL, SAMLAB, CH-2002 Neuchatel, Switzerland
[2] AppliedSensor GmbH, Reutlingen, Germany
关键词
Gas sensor; Metal-oxide (MOX) sensor; Plastic foil; Low-power electronic interface; Time-to-digital conversion; Pulsed mode; DESIGN;
D O I
10.1016/j.snb.2011.11.050
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Highly miniaturized low-power drop-coated metal-oxide gas sensors on polyimide foil are presented. Drop-coating of SnO2-based material was successfully achieved on transducers as small as 15 mu m on polyimide, a substrate compatible with the printed electronics industry. The sensors showed a very good chemoresistive response when exposed to CO and NO2. The power consumptions of the sensors ranged from a minimum of 7.7 mW for the smallest hotplate at 200 degrees C to a maximum of 28.4 mW for the largest device at 250 degrees C in continuous mode of operation. In a pulsed mode, their consumption was reduced to the sub-milliwatt range for the 15 mu m wide heaters while keeping a good chemoresistive response, widening their use to low-power applications, such as for wireless systems. The sensors were interfaced to a custom-made electronic circuitry with a readout based on time-to-digital conversion to minimize the amount of electronic components and reduce the power consumption. The power consumption of the 15 mu m wide sensor was 680 mu W in pulsed mode, while the sensor system exhibited a total power consumption of 1.9 mW. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:862 / 868
页数:7
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