Laser differential confocal lens thickness measurement

被引:22
作者
Wang, Yun [1 ]
Qiu, Lirong [1 ]
Song, Yanxing [2 ]
Zhao, Weiqian [1 ]
机构
[1] Beijing Inst Technol, Optoelect Coll, Minist Educ China, Key Lab Photoelect Imaging Technol & Syst, Beijing 100081, Peoples R China
[2] Inst Disaster Prevent, Dept Disaster Prevent Instrument, Sanhe 065201, Peoples R China
关键词
confocal; differential; lens thickness; measurement; LOW-COHERENCE INTERFEROMETRY; REFRACTIVE-INDEX; ELLIPSOMETRY; RADIUS;
D O I
10.1088/0957-0233/23/5/055204
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Based on the property that the absolute zero of an axial intensity curve exactly corresponds to the focus of the objective in a differential confocal system (DCS), a new laser differential confocal lens thickness measurement is proposed to achieve the high-precision non-contact measurement of lens thickness. The proposed approach uses the absolute zero of DCS axial response curve to precisely identify the vertexes of the test lens, obtains the central optical thickness of the test lens, and then uses the radius of curvature and refractive index of the test lens and the ray tracing facet iterative calculation to obtain the central geometrical thickness of the test lens. The theoretical analyses and preliminary experiments indicate that the measurement accuracy is better than 0.03%.
引用
收藏
页数:8
相关论文
共 17 条
  • [1] RECENT ADVANCES IN DISPLACEMENT MEASURING INTERFEROMETRY
    BOBROFF, N
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 1993, 4 (09) : 907 - 926
  • [2] IMPROVED RECORDING REFRACTOMETER FOR OPTICAL-GLASSES IN THE WAVELENGTH RANGE 300 TO 2600 NM
    DEBENHAM, M
    DEW, GD
    PUTLAND, DE
    [J]. OPTICA ACTA, 1979, 26 (12): : 1487 - 1503
  • [3] THICKNESS AND REFRACTIVE-INDEX DISPERSION MEASUREMENT IN A THIN-FILM USING THE HAIDINGER INTERFEROMETER
    DEOLIVEIRA, EA
    FREJLICH, J
    [J]. APPLIED OPTICS, 1989, 28 (07) : 1382 - 1386
  • [4] Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope
    Fukano, T
    Yamaguchi, I
    [J]. APPLIED OPTICS, 1999, 38 (19) : 4065 - 4073
  • [5] Hall WJ, 2006, Apparatus and method for detecting lens thickness US Patent, Patent No. [7433027B2, 7433027]
  • [6] ELLIPSOMETRY MEASUREMENT OF THE COMPLEX REFRACTIVE-INDEX AND THICKNESS OF POLYSILICON THIN-FILMS
    HO, JH
    LEE, CL
    LEI, TF
    CHAO, TS
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1990, 7 (02): : 196 - 205
  • [7] Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics
    Kim, Seokhan
    Na, Jihoon
    Kim, Myoung Jin
    Lee, Byeong Ha
    [J]. OPTICS EXPRESS, 2008, 16 (08) : 5516 - 5526
  • [8] Kunkel M, 2005, GLASS SCI TECHNOL, V78, P245
  • [9] Lee C, 2008, Apparatus for measuring thickness of lens US Patent, Patent No. [7637025B2, 7637025]
  • [10] Analysis of method for measuring thickness of plane-parallel plates and lenses using chromatic confocal sensor
    Miks, Antonin
    Novak, Jiri
    Novak, Pavel
    [J]. APPLIED OPTICS, 2010, 49 (17) : 3259 - 3264