An ultra-low specific on-resistance double-gate trench SOI LDMOS with P/N pillars

A novel ultra-low specific on-resistance (R-on,R-sp) trench lateral double-diffused MOSFET with P/N pillars and dual trench gates (P/N DTG-T LDMOS) based on silicon-on-insulator technology is proposed in this paper. The new structure features dual trench gates and heavily doping P/N pillars. The P/N pillars are inserted into the drift region under the P-well. The P-pillar causes an assistant depletion effect on the drift region. The N-pillar can not only improve the breakdown voltage (BV) by modulating the electric field but also significantly reduce the R-on,R-sp by increasing the doping concentration of the drift region. Furthermore, the dual trench gates form dual conduction channels and the heavily doping N-pillar provides a lower resistance region for the carriers, which can both reduce the R-on,R-sp . Consequently, compared with the conventional trench LDMOS, a lower R-on,R-sp of 0.58 m Omega cm(2) and a higher the figure of merit (FOM, FOM=BV2/R-on,R-sp) of 62.9 MW/cm(2) are obtained for the P/N DTG-T LDMOS, which are improved by 74.8% and 308.4% respectively. Meanwhile, the BVs of the both structures are maintained at a same level of 190 V. (c) 2017 Elsevier Ltd. All rights reserved.