The crystalline properties of carbon nitride nanotubes synthesized by electron cyclotron resonance plasma

被引：28

作者：

Lai, SH ^{[1
]}

Chen, YL ^{[1
]}

Chan, LH ^{[1
]}

Pan, YM ^{[1
]}

Liu, XW ^{[1
]}

Shih, HC ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

来源：

THIN SOLID FILMS | 2003年 / 444卷 / 1-2期

关键词：

carbon; nanostructures; plasma processing and deposition; X-ray photoelectron spectroscopy (XPS);

D O I：

10.1016/S0040-6090(03)01091-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Carbon nitride nanotubes (CN-NT) have been synthesized by an electron cyclotron resonance chemical vapor deposition (ECR-CVD) system with a mixture of C2H2 and N-2 as precursors without using any catalyst. The carbon nitride nanotubes were synthesized in an anodic alumina membrane as template in which a packed array of parallel, straight and uniform channels with a diameter of approximately 50-nm and 30-mum thick exists. Samples were analyzed by field emission scanning electron microscopy (FESEM), high-resolution transmission electron microscopy (HRTEM), Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Preliminary results showed that the properties of the deposited carbon nitride nanostructures depend on process parameters, such as deposited temperature, ratio of the precursors and microwave power. The aligned nanostructures have been verified by FESEM and HRTEM. The FTIR spectra reveal that some of the carbon atoms may have possibly been substituted by oxygen atom in the carbon nitride nanotubes. From the XPS results, N is either bonded to two C atoms (sp(2) pyridine-like type) or to three (sp(3) urotropine-like type) in the hexagonal sheets. The Raman spectrum showed that carbon nitride nanotubes have a high degree of graphitization. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：38 / 43

页数：6

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