Continuous Measurement of Atomic Force Microscope Tip Wear by Contact Resonance Force Microscopy

被引：42
|
作者：
Killgore, Jason P. [1 ]
Geiss, Roy H. [1 ]
Hurley, Donna C. [1 ]
机构：
[1] Natl Inst Stand & Technol, Div Mat Reliabil, Boulder, CO 80305 USA
来源：
SMALL | 2011年 / 7卷 / 08期
关键词：
NANOSCALE WEAR; STIFFNESS;
D O I：
10.1002/smll.201002116
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Contact resonance force microscopy is used during AFM scanning to resolve instantaneous and progressive nanometer-scale changes in the contact radius between an AFM tip and a silicon substrate. High-resolution quantitative measurements of contact radius reveal real-time information on wear rate, fracture, and tip-symmetry. © 2011 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：1018 / 1022
页数：5
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