Continuous Measurement of Atomic Force Microscope Tip Wear by Contact Resonance Force Microscopy

被引：42
|
作者：
Killgore, Jason P. [1 ]
Geiss, Roy H. [1 ]
Hurley, Donna C. [1 ]
机构：
[1] Natl Inst Stand & Technol, Div Mat Reliabil, Boulder, CO 80305 USA
来源：
SMALL | 2011年 / 7卷 / 08期
关键词：
NANOSCALE WEAR; STIFFNESS;
D O I：
10.1002/smll.201002116
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Contact resonance force microscopy is used during AFM scanning to resolve instantaneous and progressive nanometer-scale changes in the contact radius between an AFM tip and a silicon substrate. High-resolution quantitative measurements of contact radius reveal real-time information on wear rate, fracture, and tip-symmetry. © 2011 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：1018 / 1022
页数：5
相关论文
共 50 条
  • [21] Contact-resonance atomic force microscopy for viscoelasticity
    Yuya, P.A.
    Hurley, D.C.
    Turner, J.A.
    Journal of Applied Physics, 2008, 104 (07):
  • [22] Nonlinear contact resonance spectroscopy in atomic force microscopy
    Rupp, Daniel
    Rabe, Ute
    Hirsekorn, Sigrun
    Arnold, Walter
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (22) : 7136 - 7145
  • [23] Tip localization of an atomic force microscope in transmission microscopy with nanoscale precision
    Baumann, Fabian
    Heucke, Stephan F.
    Pippig, Diana A.
    Gaub, Hermann E.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2015, 86 (03):
  • [24] CONTACT ANGLE MEASUREMENT THROUGH ATOMIC FORCE MICROSCOPY
    Yu, Jiapeng
    Wang, Hao
    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2011, VOL 10, PTS A AND B, 2012, : 613 - 617
  • [25] Quantitative elasticity evaluation by contact resonance in an atomic force microscope
    K. Yamanaka
    S. Nakano
    Applied Physics A, 1998, 66 : S313 - S317
  • [26] Quantitative elasticity evaluation by contact resonance in an atomic force microscope
    Yamanaka, K
    Nakano, S
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1998, 66 (Suppl 1): : S313 - S317
  • [27] Estimation of three-dimensional atomic force microscope tip shape from atomic force microscope image for accurate measurement
    Harada, Yasuhiko
    Sone, Hayato
    Hosaka, Sumio
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (07) : 6186 - 6189
  • [28] Studies of tip wear processes in tapping mode™ atomic force microscopy
    Su, CM
    Huang, L
    Kjoller, K
    Babcock, K
    ULTRAMICROSCOPY, 2003, 97 (1-4) : 135 - 144
  • [29] Estimation of three-dimensional atomic force microscope tip shape from atomic force microscope image for accurate measurement
    Harada, Yasuhiko
    Sone, Hayato
    Hosaka, Sumio
    Japanese Journal of Applied Physics, 2008, 47 (7 PART 3): : 6186 - 6189
  • [30] Contact force identification using the subharmonic resonance of a contact-mode atomic force microscopy
    Abdel-Rahman, EM
    Nayfeh, AH
    NANOTECHNOLOGY, 2005, 16 (02) : 199 - 207
12345