Automated control of Czochralski and shaped crystal growth processes using weighing techniques

被引：45
作者：
Abrosimov, NV
Kurlov, VN [1 ]
Rossolenko, SN
机构：
[1] Russian Acad Sci, Inst Solid State Phys, Chernogolovka 142432, Moscow Distr, Russia
[2] Inst Crystal Growth, D-12489 Berlin, Germany
来源：
PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS | 2003年 / 46卷 / 1-2期
关键词：
D O I：
10.1016/j.pcrysgrow.2003.09.002
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：1 / 57
页数：57
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